Introduction to the sheet resistance and factors affecting the accuracy of the test square resistance

An introduction to the sheet resistance and factors that affect the accuracy of the probe method for testing the resistance of the probe:

Introduction

Introduction to the sheet resistance and factors affecting the accuracy of the test square resistance

Sheet resistance

Evaporating aluminum film, conductive paint film, printed circuit board copper foil film and other film-like conductive materials, the best way to measure their thickness is to test their square resistance. What is the square resistance? The square resistance is the square resistance, which refers to the resistance of a square thin film conductive material from side to side, as shown in Figure 1, that is, the resistance value from the B side to the C side.

The sheet resistance, also known as film resistance, is a measure of the thermal infrared performance of a vacuum coating on a sample such as a thin film layer or a glass coated film layer, which can be directly converted into a thermal infrared radiance. The size of the sheet resistance is independent of the sample size. The unit is Siements/sq, and the ohmic/sq characterization is added. The unit is directly translated into a sheet resistance or a sheet resistance, which is also called film resistance.

Factors affecting the accuracy of the probe method test square resistance:

(1) It is required that the distance from the edge of the probe to the edge of the material is larger than the distance between the probes, and generally requires more than 10 times.

(2) It is required that the distance between the probe heads is equal, otherwise an equal proportional test error will be generated.

(3) Theoretically, the smaller the point at which the probe tip is in contact with the conductive film, the better. However, in practical applications, since the needle electrode easily breaks the material of the conductive film to be tested, a circular probe head is generally used.

Finally, talk about the problems in practical application.

1. If the surface of the conductive film material to be tested is not clean, there is oil stain or the material is exposed to the air for too long, forming an oxide layer, which will affect the test stability and test accuracy. Need to pay attention in the test.

2. If the probe's probe is oily, it will cause the test to be unstable. At this time, you can wipe the probe on a clean white paper and wipe it off a few times.

3. If the material is an evaporated aluminum film or the like, and the thickness of the evaporation is too thin, the formed aluminum film cannot be uniformly connected into a single piece, but a dot-like distribution is formed, and the sheet resistance value is greatly increased, and the weighing method is passed. The calculated thickness and square resistance are not the same, so it is necessary to consider adding the correction factor at this time.

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